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Polymers for microelectronics : resists and dielectrics /

Other Authors:
Thompson, L. F., 1944-, Willson, C. G. 1939-, Tagawa, Seiichi., American Chemical Society. Division of Polymeric Materials: Science and Engineering., and American Chemical Society. Meeting
Format:
Book
Language:
English
Subjects:
Microelectronics Materials
Polymers
View in NAL's Catalog:
CAT10638704